邻近效应是双线传输线的两导体中,交流电流相互向相邻导体接近的现象。频率和磁导率愈高,电阻系数愈小,这种现象愈显著。
高频电流的邻近效应(proximity effect)是指高频电流在两相邻导体上逆向流动时,趋向在两相邻导体最接近的表面处流动。
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这里Friedman明确指出,邻近效应(neighborhood effects)可以justify常识教育,但是不能justify职业训练(vocational training)。而且他还指出,想要区分两种教育【极其困难】。
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... certificate of kindred 亲属关系证明 kindred effect 邻近效应; 同族效应; 粼近效应 kindred families 同宗亲属 ...
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邻近效应路由 proximity routing
光学邻近效应 Optical Proximity Effect
光学邻近效应修正 Optical Proximity Correction ; optical proximity effect correction ; OpticaI Pmximity correctjon
光学邻近效应校正 Optical Proximity Correction ; OPC
基因邻近效应 gene proximity
邻近效应加热 heating by proximity effect
粒子邻近效应 Particle Proximity Effect
邻近效应校正 Proximity Effect Correction
超导邻近效应 Superconductor approach effect
The proximity effect which consists in the lithography process of high energy electron beam to the resist film leads to a much larger area than the designed figures. The resolution of exposure system is reduced.
但是目前广泛使用的聚焦电子束由于加速电压高、电子散射距离长,光刻时高能电子束在对抗蚀剂的刻写过程中存在着邻近效应,使得实际曝光面积远大于设计图形尺寸,影响了曝光分辨率。
参考来源 - 纳米定位微位移工作台的控制技术研究The proximity effect which consists in the lithography process of high energy electron beam to the resist film leads to a much larger area than the designed figures. The resolution of exposure system is reduced.
但是目前广泛使用的聚焦电子束由于加速电压高、电子散射距离长,光刻时高能电子束在对抗蚀剂的刻写过程中存在着邻近效应,使得实际曝光面积远大于设计图形尺寸,影响了曝光分辨率。
参考来源 - 纳米定位微位移工作台的控制技术研究·2,447,543篇论文数据,部分数据来源于NoteExpress
利用电子束曝光机完成有关邻近效应的实验。
The proximity effect in the E-beam lithography system was verified by experiments.
利用SDS - 3电子束曝光机完成有关邻近效应的试验。
The proximity effect in the SDS-3 E-beam lithography system is verified by experiments.
实验结果表明该方法对复杂相移掩模的设计有效,可以减小邻近效应。
The experiment results show that the method is effective to devise complex phase? Shifting masks and the proximity effect is decreased.
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