为实现电子束曝光机扫描场的线性畸变校正,设计了图形发生器的成像系统,该系统包括硬件和软件两部分。
An imaging system of pattern generator was designed to correct linear distortion of scanning field of ane-beam lithography system, which was composed of both hardware and software.
该图形发生器包括硬件和软件两部分。
The Patten Generator is composed of both hardware and software.
应用推荐