在投影光刻中矢量衍射理论适用于研究照明光的偏振态对空间成像的影响。
Vector diffraction theory is applied for the investigation of the effects of the polarization state of the illumination light on the aerial images in the optical lithography.
在微小孔衍射的情况下,还讨论了矢量衍射理论对标量衍射理论相关处理的修正。
For the diffraction of a small aperture, the scalar diffraction has been modified by the vector diffraction theory.
对于DVD,标量理论的误差已经很大,要得到准确的结果就必须采用矢量衍射理论。
The error of scalar diffraction theory is very large for DVD, and vector diffraction theory must be employed to get correct result.
应用推荐