• 投影光刻矢量衍射理论适用研究照明偏振空间成像影响

    Vector diffraction theory is applied for the investigation of the effects of the polarization state of the illumination light on the aerial images in the optical lithography.

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  • 微小衍射情况下,还讨论了矢量衍射理论标量衍射理论相关处理的修正

    For the diffraction of a small aperture, the scalar diffraction has been modified by the vector diffraction theory.

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  • 对于DVD标量理论误差已经很大得到准确结果必须采用矢量衍射理论

    The error of scalar diffraction theory is very large for DVD, and vector diffraction theory must be employed to get correct result.

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  • 基于矢量衍射理论数值研究利用数值孔径聚焦的高偏振级次轴对称偏振光束实现表面等离子体干涉

    We numerically study the surface plasmon interference formed by tightly focused higher polarization order axially symmetric polarized beams (ASPBs) based on the vectorial diffraction theory.

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  • 对于典型DVD光学系统来说,矢量理论结论与标量理论相差甚,要得到正确的结果必须采用矢量衍射理论

    The result of vector theory is far from that of the traditional scalar diffraction theory for a typical DVD system, so vector diffraction theory must be adopted.

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  • 应用数值孔径系统矢量衍射理论研究球形固体浸没透镜(SIL)球面表面反射对SIL系统透射场的影响

    The reflection effect of the spherical surface of a hemisphere solid immersion lens (SIL) has been investigated using the vectorial diffraction theory for high numerical aperture systems.

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  • 采用矢量衍射理论研究场振幅为高斯分布平面波入射数值孔径物镜上 ,折射率配对共焦显微术的影响 ,并进行数值模拟。

    We considered intensity distribution of light focused by a high numerical aperture lens without spherical aberration through a planar interface between materials of mismatch refractive index.

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  • 采用矢量理论处理了台阶位相光栅衍射问题。

    A vector theory for diffraction of multi step phase grating is presented.

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  • 其分析方法包括几何理论法、标量衍射理论矢量理论

    Analyzing method includes geometry theory, scalar diffraction theory and vector diffraction theory etc methods.

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  • 其分析方法包括几何理论法、标量衍射理论矢量理论

    Analyzing method includes geometry theory, scalar diffraction theory and vector diffraction theory etc methods.

    youdao

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