n. pump-line
misc. pump-out tubulation
... Pulse tuning脉冲调谐 Pump- out tubulation抽气管道 Pump-down time抽气时间 ...
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抽空气管道 air extraction piping
抽气、排气管道连接 PECVD & Photo
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或不用抽气机，而在进气管道有一接高压清洁空气的进气口(4)。
Otherwise, the air exhauster is not necessary, and the air inlet (4) connecting with the high-pressure clean air is arranged in the air inlet pipeline.
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