以超高密度信息存储技术为应用背景，设计了低刚度高谐振频率的新型微压电悬臂梁探针，并安排了探针加工工艺流程。
Based on the applications in ultra-high-density data storage, a novel micro piezoelectric cantilever is designed, and the probe fabrication process arrangement is made as well.
在研究了等截面悬臂梁结构纳机电探针之后，本文还研究了在悬臂梁自由端集成了加热电阻的V型和U型悬臂梁维构纳机电探针。
Besides rectangular shaped cantilevers with both piezoresistive sensor and electric heater, the "V" and "U" type cantilevers are also formed for electric-heating probes.
探针悬臂在垂直于样品表面方向上的弹性常数较小，针尖不易损坏。
Due to the small spring constant of the cantilever in direction perpendicular to the sample surface tip damage is reduced.
应用推荐