以超高密度信息存储技术为应用背景，设计了低刚度高谐振频率的新型微压电悬臂梁探针，并安排了探针加工工艺流程。
Based on the applications in ultra-high-density data storage, a novel micro piezoelectric cantilever is designed, and the probe fabrication process arrangement is made as well.
在研究了等截面悬臂梁结构纳机电探针之后，本文还研究了在悬臂梁自由端集成了加热电阻的V型和U型悬臂梁维构纳机电探针。
Besides rectangular shaped cantilevers with both piezoresistive sensor and electric heater, the "V" and "U" type cantilevers are also formed for electric-heating probes.
探针悬臂在垂直于样品表面方向上的弹性常数较小，针尖不易损坏。
Due to the small spring constant of the cantilever in direction perpendicular to the sample surface tip damage is reduced.
最终开发出在微型悬臂梁上集成了电阻加热器、压阻敏感器和纳米针尖的纳机电探针制造技术。
The integration technology of the heater and piezoresistor on one ultrathin cantilever has been finally completed.
最终开发出在微型悬臂梁上集成了电阻加热器、压阻敏感器和纳米针尖的纳机电探针制造技术。
The integration technology of the heater and piezoresistor on one ultrathin cantilever has been finally completed.
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