磷化氢和砷化三氢对紫外光的吸收比硅烷强烈得多，因此，它们就沉积在容器的器壁上。

The phosphine and arsine absorb the ultraviolet light much more strongly than does silane, causing them to be deposited out on the walls of the container.

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砷化三氢的反应是典型的掺杂化学反应，图9显示了该反应的淀积过程。

Typical of the dopant chemistry is the reaction for arsine, which is depicted with the deposition process in Fig. 9.

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