磷化氢和砷化三氢对紫外光的吸收比硅烷强烈得多，因此，它们就沉积在容器的器壁上。
The phosphine and arsine absorb the ultraviolet light much more strongly than does silane, causing them to be deposited out on the walls of the container.
砷化三氢的反应是典型的掺杂化学反应，图9显示了该反应的淀积过程。
Typical of the dopant chemistry is the reaction for arsine, which is depicted with the deposition process in Fig. 9.
砷化三氢的反应是典型的掺杂化学反应，图9显示了该反应的淀积过程。
Typical of the dopant chemistry is the reaction for arsine, which is depicted with the deposition process in Fig. 9.
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