Cell characterization and modeling are very complex process in Very Deep Submicron(VDSM) technologies.
深亚微米工艺条件下的单元工艺参数提取和建模是一个极其复杂的过程，开展这方面的研究工作具有重要的学术意义和很高的实用价值。
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Familiar with deep submicron process design rule.
熟悉深亚微米工艺设计规则。
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In this article, deep submicron lithography and nano processing are reviewed.
本文综述了深亚微米光刻和纳米光刻技术。
With deep submicron technology, crosstalk noise becomes more and more serious.
随着深亚微米技术，串扰噪声问题越来越严重。
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