Electron Beam Direct Writing 属于电子束直写技术 ; 电子束直写技术 ; 电子束直写
submicro-beam direct writing 亚微米束直接写入
e-beam direct-writing exposure 电子束直写曝光
The mold manufacturing is the key part in imprint lithography process, which includes electron beam direct writing, stepping molding, and the conversion from small mold to big mold.
采用电子束直写、步进制模、压印翻制的压印模具生产工艺，其模具的制造是目前面临的难点。
At last, the feasibility of fabricating light guide plate by double beam laser direct writing system is confirmed.
最后论证用双光束激光直写系统制作亚微米光栅型导光板的可行性。
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