electron beam direct-writing lithography
electron beam direct-writing lithography
电子束直写光刻
以上为机器翻译结果，长、整句建议使用 人工翻译 。
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The mold manufacturing is the key part in imprint lithography process, which includes electron beam direct writing, stepping molding, and the conversion from small mold to big mold.
采用电子束直写、步进制模、压印翻制的压印模具生产工艺，其模具的制造是目前面临的难点。
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