微电子机械系统 MEMS ; Micro Electro Mechanical Systems ; mems-micro -electro- mechanical system ; Microelectronic Mechanical System MEMS
微光电子机械系统 MOEMS ; Micro Opto-electro Mechanical System
射频微电子机械系统 RF MEMS ; Radio Frequency micro electro mechanical Systems
磁性微电子机械系统 MMEMS
微机械电子系统 MEMS ; micro electronic mechanical system
微光电机械系统 MOEMS ; Micro OpticalElectronic Mechanics System
微机械电气系统 Micro-Electro-Mechanical Systems ; MEMS
微型光电机械系统 MOEM
集成微电子机械系统 integrated micro electro mechanical system
微电机械系统（MEMS）光开关是微电机系统技术与传统光学技术相结合的新型机械式光开关。
Optical switches made with micro-electro-mechanical systems (MEMS) technology bear advantages of both MEMS and traditional optics.
介绍了微电子机械系统中的关键执行部件——超微电机，包括静电型微电机、电磁型微电机、超声波微电机等。
Micro motors, one of the important devices in the micro electromechanical system, are discussed, including electrostatic micro-motors, electromagnetic micro-motors and ultrasonic micro-motors.
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