关键词 : 陀螺 ; 微机械加工 ; 噪声 ; 滑膜阻尼 [gap=6265]Key words : gyroscope ; silicon micromachining ; noise ; slide2film damping
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electro mechanical grinding machining 电气机械磨削加工 Micro Mechanical Machining 微机械加工 Mechanical machining and assembly 机械加工与装配 ..
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ò°2¤ÓÈ\$4¶a£Ùǽ,微机械加工 [gap=821]Keywords] micromirror cell; squeeze-film damping; mode; micro-machine processing
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As a new fabrication procedure for the microstructure, the wet and dry combined bulk micromachining techniques are developed. The fabrication process is designed and the microstructures are successfully fabricated using the microfabrication processes reported in the thesis.
采用了一种湿法和干法结合的体硅微机械加工流程，制作了典型梁-质量块微结构试件。
参考来源 - 高g值环境典型微结构动态特性及其测试技术研究·2,447,543篇论文数据，部分数据来源于NoteExpress
讨论利用微机械加工技术制作传感器的可能性、必然性。
This paper examines the possibility and necessity of using micromachining technology for sensor manufacturing.
微平版印术，显微机械加工，和微制作手册：卷一：微平版印术。
Handbook of Micro lithography, Micromachining, and Micro fabrication. Vol.1: microlithography.
本文介绍传感器微机械加工中使用的各向异性腐蚀的计算机模拟。
This paper introduces the computer simulation for the anisotropic etching used in micro-machining of sensors.
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