ion etching

• 1. 离子刻蚀: ion etching | ie | reactive ion etching | RIE
• 2. 反应离子刻蚀: Reactive-ion etching | RIE | RIE Etching | RIE-Reactive Ion Etch
• 3. 深反应离子刻蚀: DRIE | Deep Reactive Ion Etching

更多释义

• 1.并且详细论述离子刻蚀的原理以及离子源的参数设计。
  The theory of ion etching and the parameter of ion source designing are discussed in detail.
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• 2.利用并行直写技术与感应耦合等离子刻蚀技术制作了部分二元光学元件。
  Some binary optical elements were manufactured by parallel direct writing and inductive couple plasma etching technology.
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• 3.通过反应离子刻蚀可以将光刻胶微透镜图形转移至这种高性能的聚合物材料上。
  Pattern transfer technique is used to transfer photoresist microlens arrays into the polymer underlayer.
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