• 1. LPCVD: 低压化学气相沉积 | 低压化学汽相淀积 | 低压化学蒸发沉积 | 低压气相沉积
• 2. LPCVD System: 积系统
• 3. LPCVD growth: LPCVD生长

更多释义

• 1.It shows severe hump without capping silicon nitride layer due to moisture diffusion during thermal anneal after inter layer oxide deposition by LPCVD.
  它表明没有覆盖硅氮化层的严重驼峰取决于经过LPCVD的内部涂层氧化沉淀后化学处理期间的湿度扩散。
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• 2.Based on a theoretical model for LPCVD, computer simulation of PECVD polysilicon films has been performed by employing the concept of "electron temperature".
  在LPCVD理论模型基础上，通过引进“电子温度”，对PECVD多晶硅膜进行了计算机模拟分析。
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