等离子体加工技术是在半导体制造中创立起来的一种新技术。
Plasma processing technology is a new technology developed in semiconductor manufacturing.
首先，根据大气等离子体加工的原理及要求介绍了该数控加工系统的组成。
First, according to the principle and requirements of the APPP, the numerical control system composition was presented.
研究了该系统的平台设计、大气等离子体加工工艺特性及其数控加工过程。
The design of a system platform, APPP process characteristics and numerical control process were investigated.
带电的尘埃粒子广泛存在于宇宙空间、实验室的等离子体装置中和材料的等离子体加工等环境中。
Charged dust particles exist extensively in plasmas produced in space, laboratory as well as for plasma processing.
晶片等离子体加工室的结构设置成使反应性自由基与放置在晶片等离子体加工室内的晶片表面上的物质反应。
The wafer plasma processing chamber is configured to react the reactive radical with a species at a surface of a wafer disposed in the wafer plasma processing chamber.
在空气环境中利用氩等离子体射流进行材料加工时，环境空气卷吸进入射流可能会引起金属材料氧化。
When materials processing using laminar argon plasma jets is performed in ambient air, the entrainment of air into the jets will lead to the oxidation of processed metallic materials.
简要介绍了等离子体技术和微细加工技术。
Plasma technology and micro process technology are presented simply.
感应耦合等离子体触角安装在介电窗上以便定位在介电窗的中心上，并且将来自射频电源的射频功率传输到加工室内部。
An inductively coupled plasma antenna, which is installed on a center of the dielectric window, transfers radio frequency power from an RF power supply to the interior of the processing chamber.
试验表明，后处理加工中，低温等离子体对FX-2纳米粉体的表面处理能有效消除粉体的自发团聚；
Experiments show that the surface treatment of FX-2 nano powder by use of low temperature plasma can effectively remove the spontaneous agglomeration.
微波电子回旋共振等离子体是淀积薄膜、微细加工和材料表面改性的一种重要手段。
The microwave electron cyclotron resonance (ECR) plasma is one of the most important means for depositing thin films and microfabrications as well as surface modifications of materials.
等离子体处理技术作为一种清洁整理工艺越来越多地运用于纺织染整加工中。
Plasma treatment will be used as an environmental friendly technology of textile finishing process in the coming future.
水约束层可以提高等离子体的压力和脉宽，已经成功应用于激光喷丸工程化加工。
Water confinement regime can enhance the amplitude and duration of plasma pressures, and was widely applied in laser peening.
带电尘埃广泛存在于空间等离子体，实验室聚变装置及等离子体辅助加工设备中。
Charged dusts exist widely in space plasma, laboratory fusion devices and plasma assistant processing equipment.
随着加工的精密化，基于表面等离子体激元的亚波长光子集成器件在理论和实验上得到广泛研究。
Along with the processing precision, the sub-wavelength photonic integration devices based on surface plasmon are widely researched at the basic theories and experiments.
介绍了低温等离子体的概念，主要产生方法和加工纺织材料的作用机理。
The paper introduced concept of low temperature plasma, main methods of generating low-temperature plasma and the mechanism of treatment on textile materials.
最后，介绍了整个大气等离子体数控加工的实现过程。
Finally, the entire realization process of the numerical control machining for the APPP was proposed.
结合等离子体对羊毛进行生物防缩整理，探求一种绿色生产加工方法。
The shrink resistant finish of wool fabric with plasma was researched to explore a kind of green production way.
为了改善苎麻产品的染整加工性能及市场竞争力，已进行了用等离子体处理苎麻织物改善其性能的研究。
The results indicate that the capillary effect of ramie fabrics processed by RF glow discharging has been improved, the improvement of the capillary eff…
为了改善苎麻产品的染整加工性能及市场竞争力，已进行了用等离子体处理苎麻织物改善其性能的研究。
The results indicate that the capillary effect of ramie fabrics processed by RF glow discharging has been improved, the improvement of the capillary eff…
应用推荐