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利用残余气体分析仪在线监测了真空室内的残余气氛组成。
An in situ residual gas analyzer (RGA) was used to monitor the residual gas composition in the vacuum chamber.
youdao
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利用残余气体分析仪在线监测了真空室内的残余气氛组成。
An in situ residual gas analyzer (RGA) was used to monitor the residual gas composition in the vacuum chamber.
youdao