为实现母盘刻录机中光学头的精密进给，研制了精密微进给工作台及其伺服控制系统。
A high precision feed table and control system were developed to drive the optical head in a disc mastering device.
整个微位移工作台结构简单，位移分辨率高，且能够实现双向可控运动。
The working table has a simple structure, high resolution of displacement, and can achieve two-way motion.
磁悬浮式微动工作台由于运动平台和驱动机构采用非接触式的磁悬浮驱动技术而易于实现大范围高精度的微运动。
Magnetic levitation micromotion stage is easy to realize micromotion with high resolution because a contact-free magnetic levitation technique is used between the moving plate and the driving part.
为提高扫描电化学显微镜（SECM）微定位系统的运动定位精度，对其压电工作台的数学模型和控制器设计进行了研究。
In order to improve the dynamic positioning precision of scanning electrochemistry microscope(SECM), the mathematic modeling and controller design of the piezo-stage are studied.
系统由低频差双频激光干涉度量模块和微探头及二维工作台两部分组成。
The system comprises low frequency-difference two-frequency laser interferometer measuration module, micro-detection device and two dimension platform.
采用平行板移动副设计了压电陶瓷驱动纳米级微进给工作台。
Using parallel board, a nanopositioner stage driven by piezoelectric ceramics (PZT) is designed.
仿真结果表明，采用微定位工作台进行在线振动补偿，可有效地提高加工工件的表面质量。
The simulation results show that the machining accuracy of the workpiece can be effectively improved by utilizing the micro-positioning workpiece table to implement dynamic compensation.
实现超薄板材脉冲激光微铆接方法的专用装置，由激光发生器系统、工装夹具系统、工作台系统构成。
The special device realizing the ultrathin plank stuff pulse laser micro-riveting method consists of a laser generator system, a frock clamper system and a working platform system.
本文针对应用于空间多自由度微位移工作台的双轴柔性铰链机构进行研究，推导柔性铰链柔度计算公式。
This thesis researches on the double-axis flexure hinges which widely used in the space multi-DOF micro-displacement work stage, and presents the compliance equations for double-axis flexure hinges.
因其内部通常采用压电陶瓷叠堆和柔性铰链支承的组合一体式机械设计结构，使得压电工作台具有微位移分辨率高、稳定性强等优点。
Its interior usually USES combined integration machine design structure of piezoelectric stack and flexible hinge, which enabling piezo-stage has high position resolution and stability.
因其内部通常采用压电陶瓷叠堆和柔性铰链支承的组合一体式机械设计结构，使得压电工作台具有微位移分辨率高、稳定性强等优点。
Its interior usually USES combined integration machine design structure of piezoelectric stack and flexible hinge, which enabling piezo-stage has high position resolution and stability.
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