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为实现母盘刻录机中光学头的精密进给,研制了精密微进给工作台及其伺服控制系统。
A high precision feed table and control system were developed to drive the optical head in a disc mastering device.
整个微位移工作台结构简单,位移分辨率高,且能够实现双向可控运动。
The working table has a simple structure, high resolution of displacement, and can achieve two-way motion.
磁悬浮式微动工作台由于运动平台和驱动机构采用非接触式的磁悬浮驱动技术而易于实现大范围高精度的微运动。
Magnetic levitation micromotion stage is easy to realize micromotion with high resolution because a contact-free magnetic levitation technique is used between the moving plate and the driving part.
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