This paper presents the characteristics of silicon micromachining resonance vacuum sensor and a vacuum meter utilizing this sensor.
文中介绍硅微机械谐振真空传感器的特点及配套研制的真空计。
The integrated Pirani vacuum sensor system in this work can be applied for the gas pressure detector in the medium and rough vacuum measurement.
本文研制的集成皮拉尼传感器系统能够作为气压检测器应用于中真空和粗真空的测量。
An integrated CMOS-compatible Pirani vacuum sensor system has been investigated and developed in this work, combining the traditional Pirani gauge with the MEMS technology.
本文将传统的皮拉尼计与MEMS技术结合起来，研制了一款与标准CMOS工艺兼容的集成皮拉尼传感器系统。
Supply : Pirani Vacuum Sensor & Vacuum Gauges.
提供皮拉尼真空规管、真空计等。
Supply : Pirani Vacuum Sensor & Vacuum Gauges.
提供皮拉尼真空规管、真空计等。
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