专业释义
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真空传感器 - 引用次数：5
The research mainly focuses on the following six aspects:(1) Bring forward a prototype of the MEMS vacuum sensor based on field emission of silicon tips array. (2) Design the vacuum sensor's structure and complete fabrication technique.
基于纳米硅尖场发射的微真空传感器是一种以真空微电子学中的场发射现象作为输出敏感方式,利用MEMS技术制作的,用于测量真空度大小的传感器。
参考来源 - 基于纳米硅尖场发射的微真空传感器的初步研究
·2,447,543篇论文数据，部分数据来源于NoteExpress
双语例句
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Supply : Pirani Vacuum Sensor & Vacuum Gauges.
提供皮拉尼真空规管、真空计等。
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This paper presents the characteristics of silicon micromachining resonance vacuum sensor and a vacuum meter utilizing this sensor.
文中介绍硅微机械谐振真空传感器的特点及配套研制的真空计。
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The integrated Pirani vacuum sensor system in this work can be applied for the gas pressure detector in the medium and rough vacuum measurement.
本文研制的集成皮拉尼传感器系统能够作为气压检测器应用于中真空和粗真空的测量。
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