Substrate transfer apparatus, substrate process system, and substrate transfer method.
基片传递设备，基片处理系统，和基片传递方法。
Wafer transfer apparatus and wafer polishing apparatus, and method for manufacturing wafer.
Jiro Kajiwara：晶片传送装置和晶片研磨装置，以及晶片的制造方法。
A design method of transfer apparatus for disabled persons to move indoors is proposed with humanized design.
运用人性化的设计方法，提出了一种适合残障人室内移动用的移乘装置的设计方法。
The substrate transfer apparatus transfers a substrate (S) between a core chamber and the peripheral chambers.
所述基板传送装置在中心室和周边室之间传送基板（S）。
Provided is a simplified and low-cost substrate transfer apparatus wherein the number of sensors for detecting position of a substrate is reduced.
提供了一种简化的且成本降低的基板传送装置，其中减少了用于检测基板位置的传感器的数量。
A packet transfer apparatus (3) executes mutual conversion and transfer of an upper layer packet on a user terminal side and a lower layer frame on an optical wavelength path side.
数据包传送装置(3)执行用户终端侧的上层数据包和光波长路径侧的下层帧的相互转换和传送。
Transfer of personnel in conflict, without arbitration, insecurity and reliable measurement apparatus.
交接人员发生冲突，无仲裁，计量器具不安全可靠。
If appropriate, transfer a small quantity of a suitable, sterile diluent such as Fluid a (see Diluting and Rinsing Fluids for membrane Filtration) onto the membrane in the apparatus and filter.
如果适当，将少量适当的无菌稀释剂，例如液体a(见用于膜过滤的稀释和冲洗液)，转移至设备中的滤膜上并过滤。
All vanadium REDOX flow battery (VRB) is a novel electrochemical apparatus which can transfer and store electricity effectively.
全钒液流电池是一种新型高效电能转化与储存装置。
The apparatus according to the invention has a selecting circuit, a reading circuit, and a transfer circuit.
根据本发明的装置具有选择装置、读出装置和传输装置。
The present invention provides an apparatus for energy transfer using converter and method of manufacturing same.
本发明提供了使用变换器用于能量转移的设备和制造其的方法。
An apparatus includes a power supply having an energy transfer element and a shield impedance.
一种设备包括具有能量转移元件和屏蔽阻抗的电源。
Lab 2 apparatus (left to right) : computer for instrumentation and data capture, storage tank, transfer line system connected to lab's pressurized air supply.
实验二装置(由左至右)：连接仪器与资料撷取用的电脑、贮水筒、连接至实验室加压供气来源的传输管系统。
Lab4 apparatus: vertical transfer line, computer for instrumentation and data capture.
实验四装置：垂直传输管、接仪器与资料撷取用的计算机。
By studying the theory and method of realizing inductive power transfer for moving electrical apparatus in detail, this paper designs the phase-shifting full-bridge series resonance converter.
文中详细分析了感应电能传输技术的理论和方法，进而设计出用于感应电能传输系统的移相全桥串联谐振逆变器。
Based on experimental apparatus, how the spray density and water temperature affected the heat and mass transfer performance of the evaporative condenser are studied.
在蒸发式冷凝器性能测试实验平台基础上，测试了水流参数如喷淋密度和水温对蒸发式冷凝器传热传质性能的影响。
An experimental apparatus is built up to study its heat transfer characteristics and to verify the numerical model.
搭建实验台，测试导热塑料盘管蓄冰槽的传热性能，通过实验结果与理论结果的比较来验证数学模型；
The vacuum treating apparatus is provided with the substrate transfer device.
真空处理装置包括该基板搬运装置。
The experimental study of convective heat transfer in an In-line Tube Panel is carried out on the wind channel test apparatus.
在风洞实验台上进行了顺列管屏对流传热的实验研究。
A positional shift detecting apparatus for a subject to be processed is arranged on a transfer mechanism.
本发明提供位置偏移检测装置以及使用了该装置的处理系统。
The apparatus for measuring the heat transfer coefficient of various solid materials used in 4.
导热系数范围内，测出各种固体材料导热系数的装置。
The apparatus for measuring the heat transfer coefficient of various solid materials used in 4.
导热系数范围内，测出各种固体材料导热系数的装置。
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