Substrate transfer apparatus, substrate process system, and substrate transfer method.
基片传递设备，基片处理系统，和基片传递方法。
Wafer transfer apparatus and wafer polishing apparatus, and method for manufacturing wafer.
Jiro Kajiwara： 晶片传送装置和晶片研磨装置，以及晶片的制造方法。
A design method of transfer apparatus for disabled persons to move indoors is proposed with humanized design.
运用人性化的设计方法，提出了一种适合残障人室内移动用的移乘装置的设计方法。
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