This paper introduces the recent progress of optical lithography, including the concept of wavefront engineering. Some fundamental ways for optical super resolution are discussed.

对光学曝光技术的主要进展、波前工程概念和实现光学超分辨的基本途径等进行了论述。

youdao

This paper introduces the recent progress of optical lithography, including the concept of wavefront engineering. Some fundamental ways for optical super resolution are discussed.

对光学曝光技术的主要进展、波前工程概念和实现光学超分辨的基本途径等进行了论述。

youdao