the wavefront engineering
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波前工程
- 引用次数：4
So it is urgent to develop the wavefront engineering, and find a new technology to improve the resolution in photolithography.
因此，有必要拓宽波前工程学的研究内容，发展光刻分辨率增强新技术和新方法。
参考来源 - 分数傅立叶滤波改善光刻成像质量
·2,447,543篇论文数据，部分数据来源于NoteExpress
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This paper introduces the recent progress of optical lithography, including the concept of wavefront engineering. Some fundamental ways for optical super resolution are discussed.
对光学曝光技术的主要进展、波前工程概念和实现光学超分辨的基本途径等进行了论述。
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