Through testing and analysing on the optoelectronic properties of them, effects of sputtering temperature on TiOx thin films were discussed.
通过对其光电性能的分析测试，探讨了溅射温度对氧化钛薄膜性能的影响。
Through testing and analysing on the optoelectronic properties of them, effects of sputtering temperature on TiOx thin films were discussed.
通过对其光电性能的分析测试，探讨了溅射温度对氧化钛薄膜性能的影响。
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