Pt sputtering temperature 铂溅射温度
high temperature sputtering ion source 高温溅射离子源
room temperature dc magnetron sputtering 室温直流磁控溅射
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Through testing and analysing on the optoelectronic properties of them, effects of sputtering temperature on TiOx thin films were discussed.
通过对其光电性能的分析测试，探讨了溅射温度对氧化钛薄膜性能的影响。
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