Through testing and analysing on the optoelectronic properties of them, effects of sputtering temperature on TiOx thin films were discussed.
通过对其光电性能的分析测试，探讨了溅射温度对氧化钛薄膜性能的影响。
The third part is to use the sputtering, photolithography to produce heaters and temperature sensors which heat the reaction micro chamber and provide the temperature condition for the PCR reaction.
第三，用溅射、光刻等工艺在微型腔体底部制作微型加热器和温度传感器，实现对反应腔体的加热及其温度的精确测量，提供PCR扩增反应所需的温度条件。
A novel low temperature switch material VO2 thin film was fabricated by ion-sputtering and annealing.
采用离子束溅射和退火工艺制备了一种新的相变型薄膜vo2。
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