In an exemplary embodiment, a plasma processing chamber is provided.
在一个示范性实施例中，提供一种等离子处理室。
A method of fault detection for use in a plasma processing chamber is provided.
提供一种用于等离子处理室的失效检测方法。
The plasma processing chamber includes a substrate support configured to receive a substrate.
该等离子处理室包括一个配置为容纳基片的基片支撑件。
A reaction gas injection device injects a reaction gas into an interior of the processing chamber.
介电窗安装在加工室上。反应气体注入装置将反应气体注入加工室内。
A plasma generation arrangement configured to provide plasma downstream to a plasma processing chamber.
一种等离子生成装置，其配置为将等离子向下提供至等离子处理室。
In another embodiment, a method is provided for depositing a uniform film on a large-area substrate in a plasma-processing chamber.
在另一实施例中，本发明是提供一种在等离子处理腔室中大面积基板上沉积均一膜的方法。
The wafer plasma processing chamber is configured to react the reactive radical with a species at a surface of a wafer disposed in the wafer plasma processing chamber.
晶片等离子体加工室的结构设置成使反应性自由基与放置在晶片等离子体加工室内的晶片表面上的物质反应。
An inductively coupled plasma antenna, which is installed on a center of the dielectric window, transfers radio frequency power from an RF power supply to the interior of the processing chamber.
感应耦合等离子体触角安装在介电窗上以便定位在介电窗的中心上，并且将来自射频电源的射频功率传输到加工室内部。
In another embodiment, a plasma-processing chamber is adapted to create a neutral current bypass path that reduces electric current flow through a magnetic field-generating feature in the chamber.
在另一实施例中，一等离子处理腔室是适用以建立一中性电流分流路径，其可以减少电流，其中该电流是流动通过腔室中一产生磁场的特征结构。
To test the chamber, 1,000 white-shelltable eggs were obtained from a nearby egg-processing facility, transported tothe laboratory, and brought to room temperature to simulate processingconditions.
为了检验压力室，从附近的鸡蛋加工厂把1000只白壳的食用鸡蛋运送到实验室，达到室温条件，以模拟加工环境。
Crushing chamber adopts multistage crush process and finely processing principle, its feature is huge impact, high production efficiency and large crushing ability.
粉碎室采用多级破碎流程及细碎原理装置，其特点是工作冲击力大、生产效率高、细碎能力强。
Semiconductor wafer processing. Single or dual chamber, 25-wafer batch processing offers high-performance wafer cleaning, rinsing and drying.
半导体晶片处理。单或双室，25晶圆批量处理提供高晶片清洁，冲洗和脱水功能。
We are all for injection molding machine computer control, water chamber production workshop in the Taiwan strait have 10 days, with sophisticated injection mould processing equipment.
我司的注塑机均为全电脑控制，水室生产车间拥有10台海天注塑机，拥有精密的模具加工设备。
Influences of vacuum in the melting chamber, chemical composition and specifications of Mo and Mo-Nb alloy feed stock bar growing rate, rotation rate on processing Mo-Nb alloy are analyzed in detail.
对熔炼室真空度、聚焦、原料棒化学成分、尺寸规格、熔炼速度，搅拌速度等对单品制备的影响进行了详细分析。
The invention relates to a coupling system that can particularly be applied for interfacing a consumable component with a sample chamber to a laboratory instrument for processing a sample fluid.
本发明涉及一种耦接系统，该耦接系统可特别地适用于使带有样品腔室的消耗构件与实验室仪器建立接口连接以处理样品流体。
A disintegrating mill provided with the grinding chamber is suitable for processing foodstuff and fodder and can also be used for grinding materials in other industries.
具这种粉碎室的粉碎机适用于粮食、饲料加工，也可用于其他行业粉碎物料。
The utility model has the advantages of simple structure, convenient processing and small occupied space of the freezing chamber.
本实用新型结构简单，加工方便，占据冷冻室空间小。
The utility model has the advantages of simple structure, convenient processing and small occupied space of the freezing chamber.
本实用新型结构简单，加工方便，占据冷冻室空间小。
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