Therefore, a new approximation model for alternating phase shift mask considering shadowing effects was proposed in this paper, and shadowing ratio was redefined.
因此本文针对交替式相移掩模，提出了一种考虑阴影效应的近似模型。
Therefore, a new approximation model for alternating phase shift mask considering shadowing effects was proposed in this paper, and shadowing ratio was redefined.
因此本文针对交替式相移掩模，提出了一种考虑阴影效应的近似模型。
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