This paper proposes MOEMS devices, make process and packaging technology.
文章介绍了MOEMS器件，主要就其制作工艺和封装技术做了讨论。
Collimate and coupling technique is the key technology of MOEMS optical array.
准直、耦合技术是MOEMS光开关阵列的一项关键技术。
Communication is a very important application domain of micro electro opto mechanical system (MOEMS).
通信是微型光电机械系统技术的一个非常重要的应用领域。
MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
A MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
This paper presents theoretical analysis on the dynamic response of a MOEMS optical switch with a slant lower electrode.
本文从MOEMS倾斜下电极扭臂式光开关出发，介绍了动力学分析方法的过程。
The quality of laser beam is very important for many applications, such as beam shaping, diffuser, micro-lenses and MOEMS.
在激光技术应用的许多领域中，对激光光束的质量有着较高的要求。
So optical switch based on MOEMS technology will be a key optical device in the next generation optical communication system.
因此基于MOEMS技术的光开关将成为下一代全光通信网络的关键光器件。
Finally, by researching the mechanism of the anisotropy etching, the fabricating procedure of MOEMS optical switch array is designed.
最后，研究了各向异性腐蚀的机理，设计了MOEMS光开关阵列芯片的制作工艺。
Micro-optical -electro-mechanical-system(MOEMS)have received a great of interest and attention from research labs and from the industry.
微光电子机械系统（MOEMS）已经在业界受到研究人员和相关人士的极大关注。
A novel MOEMS spatial resonator based on micro-nano machining technology was put forward. The principle and structure of the resonator were introduced.
提出了一种新颖的基于微纳米加工技术的MOEMS空间谐振腔结构，介绍了其工作原理和系统构成。
Optical switch based on MOEMS technology obviously has more advantages than optical switch base on other technologies, such as wavelength transparence and polarize independence.
基于MOEMS技术的光开关和其他技术类型的光开关相比显然具有更多的优良性能，例如波长透明和偏振无关等。
The switching time calculation method of the electrostatic driven MOEMS optical switch with torsion beam structure was presented, and the formula of the switching time was given.
本文结合静电驱动扭臂式MOEMS光开关，给出了响应时间的计算方法，得出开关时间的计算公式。
This paper presents theoretical analysis for the effect of air squeeze film damping on a micro-opto- electro -mechanical systems (MOEMS) optical switch with a slant lower electrode.
从基于微机械光电系统（MOEMS）的倾斜下电极扭臂式光开关出发， 求解雷诺方程， 得到空气压膜阻尼系数和阻尼力矩的分析公式。
The relation between the air gap thickness and the peak wavelength in micro-optical electromechanical system (MOEMS) optical tunable filter based on Fabry-Perot etalon is discussed.
分析了基于法布里珀罗腔的微光机电系统可调谐滤波器中，空气腔厚度与峰值波长间的关系。
We can better control the positive photoresist figure, provide a reference for making MEMS and MOEMS, it is of an important instructional significance for deep relief of micro structure.
通过对光刻工艺过程的研究，可为较好地控制正性光刻胶面形，制作微机械、微光学器件提供了参考依据，对微浮雕结构的深刻蚀具有重要的指导意义。
In recent years, with micro-electro mechanical systems (MEMS) penetrating gradually through optics, a full new technique field-micro-opto-electro- mechanical systems (MOEMS) came into being in 1990's.
最近几年来，微电子机械系统（MEMS）逐渐向光学方面渗透，在二十世纪九十年代中后期形成了全新的技术领域—微光机电系统（MOEMS）。
In recent years, with micro-electro mechanical systems (MEMS) penetrating gradually through optics, a full new technique field-micro-opto-electro- mechanical systems (MOEMS) came into being in 1990's.
最近几年来，微电子机械系统（MEMS）逐渐向光学方面渗透，在二十世纪九十年代中后期形成了全新的技术领域—微光机电系统（MOEMS）。
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