Using the KOH anisotropy enchant the vertical micro mirror array is fabricated. And also, the result of experiment is analyzed and discussed.
使用KOH各向异性腐蚀液制作了垂直微反射镜阵列，并对实验结果进行了分析和讨论。
MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
A MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
The device is composed of a vertical mirror, a cantilever and V-grooves.
微反射镜和V型光纤定位槽的自对准由同一块掩膜板实现。
The structural FEM model is set up for the ultra-thin mirror with support structure. PV and RMS values of the mirror with horizontal or vertical optical axis are gained.
建立结构模型，对带有支撑结构的超薄反射镜进行分析，得出在光轴竖直与水平两种状态下的PV和RMS值。
The structural FEM model is set up for the ultra-thin mirror with support structure. PV and RMS values of the mirror with horizontal or vertical optical axis are gained.
建立结构模型，对带有支撑结构的超薄反射镜进行分析，得出在光轴竖直与水平两种状态下的PV和RMS值。
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