Using the KOH anisotropy enchant the vertical micro mirror array is fabricated. And also, the result of experiment is analyzed and discussed.
使用KOH各向异性腐蚀液制作了垂直微反射镜阵列，并对实验结果进行了分析和讨论。
MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
A MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
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