Other techniques involve huge lumps of machinery, but Josephson junctions can be made using the sort of microfabrication technology employed for normal silicon chips.
其他技术都需要一堆巨大的机械装置，而约瑟夫森结则可以通过运用利用普通硅芯片的微型装配技术得到。
Some polymer materials are used as substrate. Kinds of new microfabrication technology are presented, including lithography, soft etching, LIGA, DEM and bonding, etc.
系统介绍了芯片实验室的各种制备技术，这些技术包括紫外光刻、软刻蚀、LIGA技术、DEM技术、键合等。
Microfabrication of periodic structures by holographic lithography technology combining with visible laser-induce photopolymerization is developed in this paper.
本文报道用激光全息技术结合可见光光聚合制作周期结构的方法和物理机制；
The micro electro mechanical system(MEMS) is a new developed subject with a broad range in applications, and microfabrication process sequences is a key technology for the realization of the MEMS.
微机电系统是具有广泛应用前景的新兴学科，微加工工艺是实现微机电系统的关键技术。
Therefore, microfabrication will be a key technology in providing novel interfacial functions on material surfaces.
材料表面的微制作将成为产生新的功能界面的重要手段。
Therefore, microfabrication will be a key technology in providing novel interfacial functions on material surfaces.
材料表面的微制作将成为产生新的功能界面的重要手段。
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