The results are important for the understanding of the mechanism of material removal in the CMP of microelectronic materials.
其结果对于正确理解微电子材料cmp加工中的材料去除机理具有实际意义。
Information society is on the base of microelectronic industry that is built on the semiconductor silicon material.
微电子是信息社会的基础，而半导体硅材料则是微电子的支柱。
The nano polymer ball may find its wide application in new generation of microelectronic and astronautical devices as high purity nano stuffing, paint and adsorbing and separating material.
在新一代微电子和航天器件的高纯度纳米填充物、涂料、作为全新高效纳米吸附分离材料在环境、制药等领域有广阔应用前景。
The nano polymer ball may find its wide application in new generation of microelectronic and astronautical devices as high purity nano stuffing, paint and adsorbing and separating material.
在新一代微电子和航天器件的高纯度纳米填充物、涂料、作为全新高效纳米吸附分离材料在环境、制药等领域有广阔应用前景。
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