The results are important for the understanding of the mechanism of material removal in the CMP of microelectronic materials.
其结果对于正确理解微电子材料cmp加工中的材料去除机理具有实际意义。
Semiconductor silicon is the fundamental material for the microelectronic industry.
半导体硅材料是微电子产业的基础材料。
Semiconductor silicon is the most fundamental material for the microelectronic industry.
半导体硅材料是微电子产业的基础材料。
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