Micro electromechanical system (MEMS) is a kind of high technology with which people understand and change the objective world from microscopic view.
微机电系统已成为人们从微观角度认识和改造客观世界的一种高新技术。
A DC-contact series radio frequency(RF) micro electromechanical system(MEMS) switch with slanting beams was developed to eliminate warping of the cantilever beam due to residue stresses.
为解决悬臂梁结构的射频微机电系统开关在残余应力的作用下会发生翘曲的问题，提出在悬臂梁的顶端引入斜拉梁的方法。
Micro motors, one of the important devices in the micro electromechanical system, are discussed, including electrostatic micro-motors, electromagnetic micro-motors and ultrasonic micro-motors.
介绍了微电子机械系统中的关键执行部件——超微电机，包括静电型微电机、电磁型微电机、超声波微电机等。
The LCR-100 Gyrocompass AHRS is a north finding attitude and heading reference system based on a state-of-the-art fibre-optic gyro and micro-electromechanical (MEMS) accelerometers.
LCR- 100罗经ahrs系统是寻北姿态航向参考系统，基于最先进的光纤陀螺和微机电(MEMS)加速度计。
Automotive electronic control system is a kind of electromechanical technology integrated micro-electronics technology with sensor technology, and is widely used in automotive industry.
汽车电子控制系统是将微电子和传感器融为一体的机电技术，被日益广泛地应用在汽车上。
The relation between the air gap thickness and the peak wavelength in micro-optical electromechanical system (MOEMS) optical tunable filter based on Fabry-Perot etalon is discussed.
分析了基于法布里珀罗腔的微光机电系统可调谐滤波器中，空气腔厚度与峰值波长间的关系。
The connection part is connected with the stress dispersion structure and a basal plate of the micro-electromechanical system device.
以及一连接部，连接该应力分散结构及该微机电系统装置的一基板。
The micro-electromechanical system (MEMS) technology is adopted to fabricate the substrate-free bi-material micro-cantilever arrays.
采用微细加工技术制作出无基底的双材料微悬臂梁阵列结构。
The micro-electromechanical system (MEMS) technology is adopted to fabricate the substrate-free bi-material micro-cantilever arrays.
采用微细加工技术制作出无基底的双材料微悬臂梁阵列结构。
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