Micro electromechanical system (MEMS) is a kind of high technology with which people understand and change the objective world from microscopic view.
微机电系统已成为人们从微观角度认识和改造客观世界的一种高新技术。
A DC-contact series radio frequency(RF) micro electromechanical system(MEMS) switch with slanting beams was developed to eliminate warping of the cantilever beam due to residue stresses.
为解决悬臂梁结构的射频微机电系统开关在残余应力的作用下会发生翘曲的问题，提出在悬臂梁的顶端引入斜拉梁的方法。
Micro motors, one of the important devices in the micro electromechanical system, are discussed, including electrostatic micro-motors, electromagnetic micro-motors and ultrasonic micro-motors.
介绍了微电子机械系统中的关键执行部件——超微电机，包括静电型微电机、电磁型微电机、超声波微电机等。
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