Using the process, we realized the magnetic micro actuator.
并运用该工艺实现了微磁执行器。
A flexural oscillation model about V-shaped silicon electro-thermal micro actuator is presented.
提出了V型电热硅微致动器的弯曲振动力学模型。
Micro actuator is the kernel part of MEMS, with wide application range and important research value.
微执行器是微机电系统的核心部件，应用范围广泛，具有重要的研究价值。
The displacement of the micro actuator is measured by using the stereo vision micromanipulation systems.
显微立体成像微操作系统上测试了二维微执行器的位移性能。
The prototype of the micro actuator is fabricated by means of micro electroforming and SU-8 photolithography techniques.
利用SU-8光刻胶制备电铸模和微电铸工艺，制造了二维微执行器原型。
Micro actuator, as the important MEMS component, has become the research focus in Micro-Electronic Mechanical Systems (MEMS) field.
微驱动器作为微机械电子系统的核心部件，一直是微型机械电子系统(MEMS)的研究热点。
A new kind of MEMS electromagnetic micro actuator was developed, which can drive mirrors enter or leave the optical path of the switch.
研制了一种摆动式微电磁驱动器，用其驱动反射镜切入和切出光路。
Electromagnetic micromotor is an ideal micro actuator for MEMS, micro robot and micro movable elements, because of it's large output torque, long lifetime and easy in practical applications.
电磁型微马达以其输出力矩大、运行寿命长、易于实用化的优点成为微机电系统、微型机器人和微型可动部件理想的驱动器。
Nanometer scale step standards are the keys for dimension transfer, and they are the important tools to evaluate and calibrate micro actuator and micro position devices such as piezoelectric scanner.
纳米级尺度实物标准是纳米尺寸传递体系中的关键环节，也是评价和校正压电驱动等微扫描微定位装置的重要工具。
The results are helpful to the design, fabrication and application of the micro flapping actuator.
所得研究结论对微扑翼驱动机构的设计、制作和应用提供了一定的理论依据。
Micro balloon actuator array for aerodynamic control of delta wing has been explored in this paper.
本文就以用于三角翼气动控制的微气泡致动器阵列为对象展开研究。
A novel electro-thermal actuator is presented by using non-silicon micro fabrication technology.
介绍了一种由非硅微加工技术制作的电热微驱动器。
A novel micromachining torsion beam optical switch micro- actuator driven by electrostatic force was designed and simulated by means of Finite Element Method (FEM).
报导了一种新型静电驱动扭转梁大位移微机械光开关微动作器的模拟、设计和制作。
Based on MEMS technology, micro balloon actuator arrays and synthetic jets were developed for active control of flow over an airfoil.
面向主动流动控制研发了气泡型微致动器及其阵列技术和MEMS合成射流器技术。
Based on the principle of micro displacement of piezoelectric ceramic, the research on the precise actuator technique is presented, which is used for precise positioning work piece stage.
以压电陶瓷微位移原理为基础，对精密驱动技术在精密定位工件台上的应用作了实验研究。
In this dissertation, by using giant magnetostrictive thin films (GMF) as actuator, a biomimetic swimming micro robot is developed.
本文以超磁致伸缩薄膜(GMF)为驱动器，研制了一种外磁场驱动的无缆仿生游动微型机器人。
A micro sampling actuator driven by electromagnetic force is designed and fabricated by MEMS technology.
设计和采用MEMS工艺技术制作了一种由电磁驱动的微量取样执行器。
A design model was developed for a piezoelectric micro-placement actuator based on the actuation effect of piezoelectric materials.
利用压电材料的正逆压电效应，建立了压电微位移作动器的设计模型。
The paper reports the principles and applications of micro-displacement actuator and the results that we have developed.
本文报导了微位移驱动器的工作原理和用途以及我们研制这种驱动器的结果。
In this dissertation, only the piezoelectric bimorph micro-actuator and valveless piezoelectric micro pump are introduced.
本文的研究重点是压电双晶梁微驱动器和无阀压电微泵。
This paper presents a novel way of laser beam steering based on micro lens array and driven by voice coil actuator.
本文提出了一种利用音圈电机驱动微透镜阵列，实现激光束方向控制的新方法。
As compared with the traditional actuator, Micro-magnetic actuator has advantage such as smaller, lighter, cheaper and more stable process flow.
与传统的微驱动器相比，微电磁驱动器具有体积小、重量轻、加工工艺稳定以及成本低等优点。
Power supply is the key component in micro piezoelectric actuator "s application."
压电陶瓷驱动电源是压电陶瓷微位移器应用中关键部件。
A electromagnetic actuator was designed and fabricated to drive silicon micro-pump membrane. Some theoretical analysis and experimental evaluation were made in this paper.
根据硅微泵的结构特点，制作出用于微型泵的电磁致动器，并对该电磁致动器进行了分析与振动测试。
The electric fatigue and failure have significantly impeded the commercial applications of ferroelectric ceramics in micro-actuator and micro-performer devices.
电疲劳失效是阻碍铁电陶瓷材料应用于微驱动和微执行器件的主要原因。
In this paper, a new micro-positioning servo control system using a piezoelectric. Actuator is introduced, the hardware consist and working principle are also given.
本文介绍了作者最新研制的一种高精度压电陶瓷驱动微进给伺服控制系统，给出了系统的硬件组成及工作原理。
According to the needs of micro-manipulation, a prototype of miniature robot driven by piezoelectric actuator is designed.
为适应微细操作的需要，研制了一种压电陶瓷驱动的微小型步行机样机。
Piezoceramics telescopic micro-actuator was used in design of micro-gripper of robot.
机器人微操作手设计采用压电伸缩陶瓷微位移器。
The driving mode, the advantage and disadvantage upon micro-actuator, the traits, applications and the principle of electrostatic comb-drive are introduced.
介绍了微执行器的驱动方式及各自的优缺点、静电梳齿结构的特点和应用以及静电梳齿结构的工作原理。
A new piezoelectric ceramic micro-actuator for high-density hard disk drives is proposed and developed.
制作一种新型压电陶瓷微致动器，用于高密度硬盘驱动器磁头的精确定位。
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