Electromagnetic micromotor is an ideal micro actuator for MEMS, micro robot and micro movable elements, because of it's large output torque, long lifetime and easy in practical applications.
电磁型微马达以其输出力矩大、运行寿命长、易于实用化的优点成为微机电系统、微型机器人和微型可动部件理想的驱动器。
Nanometer scale step standards are the keys for dimension transfer, and they are the important tools to evaluate and calibrate micro actuator and micro position devices such as piezoelectric scanner.
纳米级尺度实物标准是纳米尺寸传递体系中的关键环节，也是评价和校正压电驱动等微扫描微定位装置的重要工具。
A flexural oscillation model about V-shaped silicon electro-thermal micro actuator is presented.
提出了V型电热硅微致动器的弯曲振动力学模型。
A new kind of MEMS electromagnetic micro actuator was developed, which can drive mirrors enter or leave the optical path of the switch.
研制了一种摆动式微电磁驱动器，用其驱动反射镜切入和切出光路。
Micro actuator is the kernel part of MEMS, with wide application range and important research value.
微执行器是微机电系统的核心部件，应用范围广泛，具有重要的研究价值。
Micro actuator, as the important MEMS component, has become the research focus in Micro-Electronic Mechanical Systems (MEMS) field.
微驱动器作为微机械电子系统的核心部件，一直是微型机械电子系统(MEMS)的研究热点。
In this dissertation, only the piezoelectric bimorph micro-actuator and valveless piezoelectric micro pump are introduced.
本文的研究重点是压电双晶梁微驱动器和无阀压电微泵。
Piezoceramics telescopic micro-actuator was used in design of micro-gripper of robot.
机器人微操作手设计采用压电伸缩陶瓷微位移器。
The electric fatigue and failure have significantly impeded the commercial applications of ferroelectric ceramics in micro-actuator and micro-performer devices.
电疲劳失效是阻碍铁电陶瓷材料应用于微驱动和微执行器件的主要原因。
A new piezoelectric ceramic micro-actuator for high-density hard disk drives is proposed and developed.
制作一种新型压电陶瓷微致动器，用于高密度硬盘驱动器磁头的精确定位。
The driving mode, the advantage and disadvantage upon micro-actuator, the traits, applications and the principle of electrostatic comb-drive are introduced.
介绍了微执行器的驱动方式及各自的优缺点、静电梳齿结构的特点和应用以及静电梳齿结构的工作原理。
The driving mode, the advantage and disadvantage upon micro-actuator, the traits, applications and the principle of electrostatic comb-drive are introduced.
介绍了微执行器的驱动方式及各自的优缺点、静电梳齿结构的特点和应用以及静电梳齿结构的工作原理。
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