The calculated results about the temperature and the mass flow density on the substrate are consistent with experimented ones.
结果表明，衬底处的温度分布和质量流密度的计算值与实测值相吻合。
The calculated results about the temperature and the mass flow density on the substrate are consistent with experimented ones.
结果表明，衬底处的温度分布和质量流密度的计算值与实测值相吻合。
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