Furthermore, a stepwise approach with varying step lengths, and a compensation strategy following the manipulator's rotation are introduced in the IC mask alignment.
对准控制采用阶梯步长逐步逼近算法，并且引入了机械手姿态调整后的补偿控制，以提高对准效率。
Furthermore, a stepwise approach with varying step lengths, and a compensation strategy following the manipulator's rotation are introduced in the IC mask alignment.
对准控制采用阶梯步长逐步逼近算法，并且引入了机械手姿态调整后的补偿控制，以提高对准效率。
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