Results show that nano-particle reinforced composite fabricated by LIGA process has high strength;
结果表明，LIGA复合技术得到的纳米颗粒增强镍基复合材料具有较高的强度；
LIGA process and the actualities of multiple masks technology, replication technology and contour polishing technology are introduced.
介绍了LIGA加工工艺以及多层掩模技术、复制技术、外形磨削成型技术的现状。
Making method of high deep-width rate, batch production of planar windings with LIGA process and silicon deep etching process is researched .
较深入地研究了以LIGA工艺、硅深刻蚀工艺为主的平面绕阻的高深宽比、批量化制作方法。
Two new methods of fabricating micromegas are introduced, one is a quasi LIGA process using SU8 as the insulation layer, and the other is a process using a dry film as a patternable insulation layer.
本文介绍了利用两种方法制作微网气体探测器微结构的工艺，一种是利用准LIGA工艺，以SU8胶为绝缘层；另一种是利用干膜做绝缘层来制作微网气体探测器。
LIGA mask technology based on silicon process technique and double side alignment is presented. The processing technology is simple.
提出一种基于硅工艺和双面对准技术的LIGA掩模技术，工艺十分简单。
Now SU8 resist has been used to make the LIGA mask for the LIGA standard process and some devices researching work.
SU 8光刻胶已应用于LIGA技术的标准化掩模制造工艺和一些器件的研究工作。
Single step mask fabrication process is developed for LIGA technology, which made mask-making process simplified.
在LIGA技术研究中提出了一次掩膜成型法，简化了工艺过程；
Process parameters of SU-8 photoresist based UV-LIGA technique were optimized. The influences of expose time and the wavelength of expose source (on the resist formation) were investigated.
对基于SU - 8胶的UV -LIGA技术进行了工艺优化，研究了光源波长和曝光时间对SU - 8胶成型的影响。
This article mainly explains the process of LIGA technology, which includes X-ray mask lithography, Micro-electroforming and Micro-copy.
本文主要阐述了LIGA技术的工艺过程，包括X射线深层光刻、微电铸和微复制工艺。
This article mainly explains the process of LIGA technology, which includes X-ray mask lithography, Micro-electroforming and Micro-copy.
本文主要阐述了LIGA技术的工艺过程，包括X射线深层光刻、微电铸和微复制工艺。
应用推荐