...可分为以下三种:体型微加工技术(Bulk micromachining)面型微加工技术(Surface micromachining)微光刻电铸造模技术(LIGA process) 体型微加工技术(Bulk micromachining)
基于20个网页-相关网页
Results show that nano-particle reinforced composite fabricated by LIGA process has high strength;
结果表明，LIGA复合技术得到的纳米颗粒增强镍基复合材料具有较高的强度；
LIGA process and the actualities of multiple masks technology, replication technology and contour polishing technology are introduced.
介绍了LIGA加工工艺以及多层掩模技术、复制技术、外形磨削成型技术的现状。
Two new methods of fabricating micromegas are introduced, one is a quasi LIGA process using SU8 as the insulation layer, and the other is a process using a dry film as a patternable insulation layer.
本文介绍了利用两种方法制作微网气体探测器微结构的工艺，一种是利用准LIGA工艺，以SU8胶为绝缘层；另一种是利用干膜做绝缘层来制作微网气体探测器。
应用推荐