The paths of the corrosive gas can be a hollow cavity formed in the foreign substrate base bar, the hollow cavity and the nitride reacting chamber are separated by the foreign substrates.
所述腐蚀性气体通路可为异质衬底基座杆内形成的中空内腔，该中空内腔和氮化物生长反应腔通过异质衬底隔开。
The paths of the corrosive gas can be a hollow cavity formed in the foreign substrate base bar, the hollow cavity and the nitride reacting chamber are separated by the foreign substrates.
所述腐蚀性气体通路可为异质衬底基座杆内形成的中空内腔，该中空内腔和氮化物生长反应腔通过异质衬底隔开。
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