The paths of the corrosive gas can be a hollow cavity formed in the foreign substrate base bar, the hollow cavity and the nitride reacting chamber are separated by the foreign substrates.
所述腐蚀性气体通路可为异质衬底基座杆内形成的中空内腔，该中空内腔和氮化物生长反应腔通过异质衬底隔开。
Foreign matter on a part of the substrate to be cleaned in a pre-treatment system.
在预处理系统被清洗的工件上的杂质。
Foreign matter on a part of the substrate to be cleaned in a pre-treatment system.
在预处理系统被清洗的工件上的杂质。
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