The cathode electric arc source is used as the source of ion infiltrating metals.
本文用阴极电弧源做离子渗金属源。
It was found that the substrate floating potential changes a lot when the grounded state of arc source changed.
在实验过程中还发现弧源不同的接地方式对基片台悬浮电位有很大的影响。
Several technical problems in arc source design, including arc mode, arc polarity, ignition mechanism and arc confinement and macroparticle reduction were discussed.
讨论了真空电弧沉积中弧源设计的有关问题，如电弧运行模式、电弧极性、点火方式、电弧的约束方式以及宏观粒子抑制方式等。
The utility model relates to a novel dynamic magnetic control arc source device for improving the arc ion plating deposition technique, belonging to the film making field.
本实用新型涉及薄膜制备领域，具体地说是一种新型的改善电弧离子镀沉积工艺的动态磁控弧源装置。
The utility model relates to a novel dynamic magnetic control arc source device for improving the arc ion plating deposition technique, belonging to the film making field.
本实用新型涉及薄膜制备领域，具体地说是一种新型的改善电弧离子镀沉积工艺的动态磁控弧源装置。
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