本发明涉及一种离子注入机用的晶片夹，属于半导体装备制造领域。
The invention relates to a wafer clamp for an ion implanter which belongs to the field of semiconductor equipment manufacture.
简单介绍了典型离子注入机的组成，分析了离子注入机中扫描技术的重要性。
Introduced the configuration of typical ion implanter, analyzed the importance of the implantation mechanical scanning technology.
将不同单质机械混合，在不增加注入机离子源数目的基础上实现了不同离子的共注入。
To achieve co-implantation without additional ion sources, the required implants are mixed to form a cathode of MEVVA ion source.
这些注入机的特征是硬件和设计原理通用，并包含离子束注入角控制、剂量测定和终端站设计。
These implanters feature common hardware and design principles including beam incidence Angle control, dosimetry, and end station design.
垂直扫描机构是单晶片离子注入机靶盘的支撑部件，起着将高速直线运动从靶室外传递到靶盘的作用。
Vertical scanner is the supporting part of a series process ion implanter, which transfer high speed movement from outside of the chamber to the target inside.
采用无质量分析器的离子注入机，以低能量低剂量注水的方式代替常规SIMOX注氧制备soi材料。
An implanter without ion mass analyzer was used to fabricate thin SOI materials by low energy and low dose water ions implantation instead of conventional SIMOX.
本发明涉及离子注入机imp，包括脉冲等离子体源spl、衬底支承台PPS和所述台的电源alt。
The invention relates to an ion implanter (imp) comprising a pulsed plasma source (SPL), a substrate support plate (PPS) and a power supply (ALT) for said plate.
通过对离子注入机离子源灯丝绝缘子的结构、尺寸、实际工作效果等方面的分析，提出了一种注入机离子源灯丝绝缘子的优化设计。
Based on the analysis of the structure, size, and actual work efficiency of an ion source filament insulator in ion implantation system, an optimization design of the filament insulator is presented.
如图1所示，在部署期间WebSphereCloudBurst自动地把IP地址注入它创建的每个虚拟机。
As depicted in Figure 1, WebSphere CloudBurst automatically injects IP addresses into each virtual machine it creates during the deployment process.
接下来，设备通过适当的虚拟映像创建虚拟机，把取自用户定义的池的惟一ip地址注入每个虚拟机。
Next, the appliance creates the virtual machines from the appropriate virtual image, and it injects unique IP addresses from a user-defined pool into each machine.
他在一部分热狗中注入了金属物质，将热狗放在发射机与接受机之间，然后启动了机器。
He injected parts of them with minerals, placed them between the transmitter and receiver, and fired up his machine.
建筑起重机伸向天空，但越来越多只是矗立在那里，在工作重新开始前，必须等待新鲜注入的资金。
Construction cranes jut into the skyline, but increasingly they are fixed in place, awaiting fresh financing before work resumes.
当把这些细胞注入到微型核磁共振机中，微型核磁共振机则会检测九种针对癌细胞的蛋白质标记的级别，并向智能手机输出结果。
The device, whose data can be read with a smart phone application instead of a computer, detected levels of nine protein markers for cancer cells.
首先，科学家们给老鼠注入了这种激素，并且将录像机对准它们的鼻子。
First, scientists injected rats with ghrelin, and videotaped their noses.
尽管在年底之前俱乐部的股权不太可能被出售，但是注入到俱乐部的现金将令格雷泽家族在财务上的喘息之机（根据jjq1985意见修改），并可能借此缓解同球迷之间的紧张情绪。
Though a share sale is unlikely to happen before the end of the year, an infusion of cash would provide the Glazers with financial breathing room and perhaps ease tensions with their fans.
mbeanServerbean 被注入到 exporterbean —将MBean列表呈现给JMX客户机（比如 JConsole）的类。
The mbeanServer bean gets injected into the exporter bean — the class that exposes the list of MBeans to JMX clients like JConsole.
在地毯上吸尘并除渍。将本品注入装满水的水箱后干泡清洁地毯。在地毯未干时用地毯梳梳起纤维。待干后用滚刷式吸尘机彻底吸尘。
Vacuum carpet and remove spots. Dose into water tank and shampoo carpet. Brush carpet pile while still damp. Allow to dry, then thoroughly brush vacuum.
相信，这支新生力量的注入，会为中国摄像机市场的竞争格局带来一些有趣的改变。
The trust, this strength for new life's injection, will bring some interesting changes for the Chinese camera market competition pattern.
他近期上市的产品之一是风火轮车模(HotWheelsCar)制造机。它能让孩子们把融化的蜡注入一个车身模具，自己做出车模。
One of his most recent projects to hit the shelves is the Hot Wheels car Maker that lets kids inject melted wax into a car body mold.
在某些海上挠性管作业机或特殊陆上挠性管作业机上用于使注入头和压力控制设备稳定的支承构架。
A support structure used to stabilize the injector head and pressure-control equipment on some offshore, or special onshore, coiled tubing units.
罐装瓶与快装接头相接，压缩机通电5分钟以上，注入制冷剂。
Connect the canned bottle with the process tube and then compressor work for more than 5 minutes.
同时，针对离子注入航空轴承而研制的离子束多功能机，解决了球面无法均匀注入的难题。
Meanwhile, Developed ionic beam machine with multiple functions for the ion implantation into the material of aero-bearing solved the problem of non-uniformity implantation on spherical surface.
这种气体，然后通过压缩机式水过滤器，以消除任何剩余的水分，并把该车辆的进气口注入。
The gas is then passed through a compressor-style water trap to remove any remaining moisture, and is injected into the air intake of the vehicle.
要达到这个目的，该公司使用了一种称之为ocn(内燃旋转喷嘴)的装置。这个装置会随着压缩机转动，从而让空气以漩涡形式注入内燃仓。
To achieve this, the company USES what it calls an orbiting combustion nozzle (OCN), which turns with the compressor to inject the air into the combustion chamber as a vortex.
她补充说，这就是所谓的“艺术性注入效用”。其应用范围极广，上至银器、下至给皂机都适用。
This so-called "art infusion effect" seems to work for everything from silverware to soap dispensers, she added.
主动式运动传感器可以在下面情况下使用：一束光从发射机注入到接收机，光束交叉时检测到不同。
Active motion sensors are available where a beam of light is injected from a transmitter to a receiver and differences are detected when the beam is crossed.
采用单片机开发了用于三次采油的多功能三元注入泵综合参数检测系统。
Multifunctional three-injecting-pump detecting system suitable for testing comprehensive parameters in tertiary process was designed using MCU.
采用单片机开发了用于三次采油的多功能三元注入泵综合参数检测系统。
Multifunctional three-injecting-pump detecting system suitable for testing comprehensive parameters in tertiary process was designed using MCU.
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