本发明还涉及使用所述注入机的方法。
The invention also relates to a method of using said implanter.
本发明涉及一种离子注入机用的晶片夹，属于半导体装备制造领域。
The invention relates to a wafer clamp for an ion implanter which belongs to the field of semiconductor equipment manufacture.
简单介绍了典型离子注入机的组成，分析了离子注入机中扫描技术的重要性。
Introduced the configuration of typical ion implanter, analyzed the importance of the implantation mechanical scanning technology.
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