聚酰亚胺薄膜由于其良好的物理化学性能，成为柔性衬底的理想材料。
Polyimide film has been the ideal flexible substrate for its physical and chemical performance.
至少有一条凹槽延伸穿过体区和衬底。
At least one trench extends through the body region and the substrate.
衬底型ISFET是一种化学敏感器件。
该方法然后制造金属支承结构代替衬底。
The method then fabricates a metal support structure in place of the substrate.
栅极设置于基底衬底上，横跨鳍状结构。
The gate is disposed on the substrate and straddled the fin structure.
研究了衬底材料、基片温度对膜微结构的影响。
The effect of substrate materials and its temperature on film micro structure is studied.
研究了衬底材质及表面粗糙度对薄膜结构的影响。
The effects of substrate material and surface roughness on it are studied.
该材料在不需要衬底加热的情况下于室温即具有快的流动速率。
It has fast flow at room temperature without pre-heating the substrates.
该材料在不需要衬底加热的情况下于室温即具有快的流动速率。
It has fast flow at room temperature without pre-heating the substrates.
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