A uniaxial tensile test method for measuring mechanical properties of MEMS thin film materials is presented.
介绍了一种用于MEMS薄膜材料力学特性测试的单轴拉伸试验方法。
A new system for the in situ extraction of the material parameters of MEMS films is presented.
给出了一种MEMS薄膜材料参数的在线测试技术与方法。
The single axis table series rt 1100 is an accurate position rate system designed for the test and calibration of MEMS, gyros, accelerometers and inertial guidance systems.
单轴平台系列rt 1100是一个高精度位率系统，其设计宗旨在于测试及校正MEMS、陀螺仪，加速表和惯性制导系统。
Theoretical analysis and experiments have demonstrated that the technology can improve diffraction efficiency of MEMS blazed gratings for about 10% or so.
理论分析和实验测试证明，该工艺方法能够将MEMS闪耀光栅的衍射效率提高10%左右。
Therefore, it's very important of micro adhesion testing technology in studying adhesion problem of MEMS.
因此，对于MEMS粘着问题的研究，微观粘着测试技术显得极为重要。
Studying the test method for mechanical properties of MEMS materials is the key related to solve the MEMS design, manufacturing, quality control and appraisal.
研究微材料机械力学性能的测试方法是解决MEMS设计、制造、质量控制与评价的关键环节。
Based on machine micro-vision dynamic testing system for MEMS, the technique of blur image synthesis is presented to exact and analyze in-plane motion characteristic of MEMS devices.
基于机器微视觉的MEMS动态测试系统，利用模糊图像合成技术对MEMS的平面微运动特性参数进行提取和分析。
This is a typical optical, mechanical, electronic and calculated integral system and can be applied to the geometry and dynamic measurement of MEMS microstructure.
该系统是一个典型的光、机、电、算集成的MEMS测试系统，已应用于MEMS微结构几何尺寸和动态特性等的测量。
According to the requirement of the MEMS test, a MEMS testing system using computer microvision was developed.
根据MEMS测试的要求，设计并实现了一种基于计算机视觉的MEMS测试系统。
Based on MEMS dynamic testing system this paper designs a set of stroboscopic driving circuits to acquire clear image of high speed MEMS device.
本文基于机器微视觉的MEMS动态测试系统，设计了一套频闪驱动电路，用于采集高速运动的MEMS器件的清晰图像。
This dissertation aims to solve two key problems on optimizing design of mechanism and driving technique for the development of a test instrument for measuring mechanical properties of MEMS materials.
本文的研究目的是为一种MEMS材料力学性能测试仪的研制解决机构优化设计和驱动技术两大关键问题。
Based on MEMS technology and electrochemical detecting principle of bio-enzyme catalysis, one biochip has been developed.
基于生物酶催化的电化学电流检测原理对人体血液生化参数进行测试。
This paper designs a set of MEMS dynamic testing system based on machine micro-vision.
本文设计了一套基于机器微视觉的MEMS动态测试系统。
Design, fabrication and test results of DC-contact Cantilever RF MEMS Series Switches are reported.
报道了悬臂梁接触式RFMEMS开关的设计、制作和测试结果。
MEMS dynamic testing system based on stroboscopic microscopic interferometry is introduced. The algorithm of data analyzing is developed.
介绍了基于频闪显微干涉技术的MEMS动态测试系统的测量原理，设计了数据分析处理算法。
Among those, testing technique of dynamic characterization has the most important significance in the course of research and development of MEMS.
其中动态特性测试技术在MEMS研发过程中具有最为重要的意义。
A measurement system for in-situ extracting material parameters of MEMS thin film was proposed based on Data Acquisition.
建立了一套基于数据采集的MEMS薄膜材料参数在线测试系统。
PZT film is one of the most useful functional materials and has been very widely used in MEMS.
基于该系统开发出了简单、可靠、可调性好并具有较高精度的PZT铁电薄膜介电性能测试系统。
In order to obtain the mechanical properties of MEMS materials, it is necessary to develop a test instrument, which is specially used to measure mechanical properties of MEMS materials.
为了能正确测得MEMS材料的力学性能参数，有必要研制一台MEMS材料力学性能测试仪。
Testing technique based on MEMS mainly includes testing technique of material characterization, dynamic characterization and reliability characterization.
基于MEMS的测试技术主要有MEMS材料特性测试技术、MEMS动态特性测试技术、MEMS可靠性测试技术等方面。
The transient characteristics of the dynamic stress of MEMS (Micro Electro Mechanical system) decides that it is hard to be measured directly by using the traditional stress measurement system.
微机电系统(MEMS)动态应力的瞬态特性决定了传统的应力测试系统无法直接满足它的测试需要。
In general, MEMS devices are mm size in overall and um size in local. Thus, the testing technical is required to have high spatial resolution and large field of view.
一般来说，MEMS器件具有毫米级的整体尺寸和微米级的局部尺寸，因此，测试技术要求尽可能同时具有大视场、空间分辨率高的性能。
In general, MEMS devices are mm size in overall and um size in local. Thus, the testing technical is required to have high spatial resolution and large field of view.
一般来说，MEMS器件具有毫米级的整体尺寸和微米级的局部尺寸，因此，测试技术要求尽可能同时具有大视场、空间分辨率高的性能。
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